| Jahr | 2004 |
| Autor(en) | A. Priebe, N. Walter, and A. Pucci |
| Titel | An IR spectroscopic study of silicon oxynitride films. |
| KIP-Nummer | HD-KIP 04-72 |
| KIP-Gruppe(n) | F6 |
| Dokumentart | Paper |
| Quelle | Conference Digest of the 29th International Conference on Infrared and Millimeter Waves and of the 12th International Conference on Terahertz Electronics, Karlsruhe,Germany, 2004 (edited by M. Thumm and W. Wiesbeck), IEEE Catalog No. 04X857, ISBN 0-78038490-3, p.93 |
| doi | 10.1109/ICIMW.2004.1421969 |
| bibtex | @inproceedings{Priebe04b,
author = {Priebe, A. and Walter, N. and Pucci, A.},
title = {An IR spectroscopic study of silicon oxynitride films.},
booktitle = {Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the },
year = {2004},
editor = {Thumm, M. and Wiesbeck, W.},
volume = {},
pages = {93}
} |
| URL | http://dx.doi.org/10.1109/ICIMW.2004.1421969 |
